1191. Interferometric controlled planar positioning system with zerodur slider   S. Hesse, C. Schäffel H-U. Mohr H.-J. Büchner Ilmenau: 56. IWK der TU Ilmenau. 12.09. - 16.09.2011  

  1192. Interferometric Test Station for Parallel Inspection of MEMS   C. Schäffel, S. Michael R. Paris A. Frank N. Zeike K. Gastinger M. Kujawinska U. Zeitner S. Beer Dresden: 5. Tagung 'Feinwerktechnische Konstruktion'. http://141.30.123.140/feinwerkwiki/index.php/5._Tagung_Feinwerktechnische_Konstruktion  

  1193. Interferometric Test Station for Parallel Inspection of MEMS   C. Schäffel, S. Michael R. Paris A. Frank N. Zeike K. Gastinger M. Kujawinska U. Zeitner S. Beer. Dresden: 5. Tagung 'Feinwerktechnische Konstruktion'. 03.11.2011  

  1194. Interferometrically controlled, scalable x-y planar positioning stage concept   Ilko Rahneberg, Enrico Langlotz Denis Dontsov Steffen Hesse Jaqueline Stauffenberg Eberhard Manske Special Interest Group Meeting: Micro/Nano Manufacturing, 17 – 18 November 2021, Virtual  

  1196. Investigation of detectors for optical pick-up systems for DVD applications   J. Klein, St. Lange session of the conference SENOR 2003, Mai 2003  

  1197. Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor   Davi Anders Brasil, Steffen Hesse Michael Katzschmann Ludwig Herzog Thomas Fröhlich Thomas Kissinger 20th International Conference on Precision Engineering (ICPE2024), Sendai, Japan, October 23-26, 2024  

  1198. Investigation of thermal and non-linear effects on the performance of the power amplifier - BAW filter - chain in a LTE transmitter   Uwe Stehr, J. Stegner V. Chauhan V. Silva R. Weigel A. Hagelauer Astrid Frank Steffen Michael M. A. Hein 2018 IEEE International Ultrasonics Symposium, IUS 2018, 22-25 October 2018, Kobe, Japan  

  1199. Investigations of metal systems in a silicon ceramic composite substrate for electrical and thermal contacts as well as associated mounting aspects   M. Fischer, T. Welker B. Leistritz S. Gropp C. Schäffel M. Hoffmann J. Müller Ceramic Interconnect and Ceramic Microsystems Technologies, Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT): May 2016, Vol. 2016, No. CICMT, pp. 000107-000110, DOI: http://dx.doi.org/10.4071/2016CICMT-WA22  

  1200. Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)   Jaqueline Stauffenberg, Ingo Ortlepp Ulrike Blumröder Denis Dontsov Christoph Schäffel Mathias Holz Ivo W. Rangelow Eberhard Manske tm - Technisches Messen. 2021, 88(9): 581-589. DOI: https://doi.org/10.1515/teme-2021-0079