Aktuelle Publikation
Thick Copper Re-Distribution Layer for Integrated High Voltage Transistors
Ralf Lerner1.
Klaus Heinrich1.
Marco Erstling1.
Peter Kornetzky2.
14th International Seminar on Power Semiconductors (ISPS), 29-31 August 2018, Prague, Czech Republic
1X-FAB Semiconductor Foundries AG, Erfurt, Germany.
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.