Aktuelle Publikation
Testing of Ultra-sensitive materials for nanoelectromechanical systems - USENEMS
R. Grieseler1.
J. Klaus2.
M. Stubenrauch3.
K. Tonisch3.
S. Michael2.
J. Pezoldt3.
P. Schaaf3.
Lanzarote, Canary Islands, Spain: ECI Conference on Nanomechanical Testing in Materials Research and Development. (invited). 9.10.2011
1Ilmenau University of Technology, Institute of Micro- and Nanotechnologies MacroNano® and Institute of Materials Engineering, Department Materials for Electronics, Germany.
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
3Ilmenau University of Technology, Institute of Micro- and Nanotechnologies MacroNano®, Department of Nanotechnology.
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