Aktuelle Publikation
Testing of mechanical properties of AlGaN thin films by Eigenmode detection on Microeletromechanical Systems (MEMS)
R. Grieseler1.
K. Tonisch2.
J. Klaus3.
M. Stubenrauch2.
S. Michael3.
J. Pezoldt2.
P. Schaaf2.
Int. Conference on Metallurgical Coating and Thin Films, ICMCTF, San Diego, USA, 23.04.2012-27.04.2012
1Ilmenau University of Technology, Institute of Micro- and Nanotechnologies MacroNano and Institute of Materials Engineering Department Materials for Electronics.
2Ilmenau University of Technology, Institute of Micro- and Nanotechnologies MacroNano Department of Nanotechnology..
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
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