Aktuelle Publikation
SMARTIEHS - The interferometric test station for parallel inspection of MEMS and MOEMS
K. Gastinger1.
M. Kujawinska2.
U. Zeitner3.
C. Gorecki4.
Dr. Ch. Schäffel5.
11th Scientific Conference Optoelectronic and Electronic Sensors COE, 20.06-23.06.2010, Polen
1SINTEF IKT Optical measurement systems and data analysis, Trondheim, Norway.
2Warsaw University of Technology, IMiF, Warsaw, Poland.
3Fraunhofer IOF, Jena, Germany.
4CNRS FEMTO-ST, Besançon, France.
5IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
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