Aktuelle Publikation
Sensor for Picometer-Scale Positioning in Vacuum – Demonstration of an IDS3010-Based Ultra-Precise Closed-loop Linear Drive System
Markus Øverland1, Gregor Schindler1, Alex S. Huaman2, Ludwig Herzog2
Technical Note: Motion & Sensing 15, attocube systems GmbH, V10/25, , PDF: https://marketing.attocube.com/
1attocube systems GmbH, Eglfinger Weg 2, 85540 Haar, Germany, 2IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany