Aktuelle Publikation
Sensor for Picometer-Scale Positioning in Vacuum – Demonstration of an IDS3010-Based Ultra-Precise Closed-loop Linear Drive System
Markus Øverland1.
Gregor Schindler1.
Alex S. Huaman2.
Ludwig Herzog2.
Technical Note: Motion & Sensing 15, attocube systems GmbH. V10/25. PDF: marketing.attocube.com/acton/attachment/4434/f-ed569c35-99d8-435b-b87f-8f6a30a97ca2/1/-/-/-/-/TechNote_MAS-15_Sensor%20for%20Picometer-Scale%20Positioning%20in%20Vacuum.pdf
1attocube systems GmbH, Eglfinger Weg 2, 85540 Haar, Germany.
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.