Aktuelle Publikation
Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS
Dr. Ch. Schäffel1.
S. Michael1.
B. Leistritz1.
M. Katzschmann1.
N. Zeike1.
K. Gastinger2.
M. Kujawinska3.
M. Jozwik3.
S. Beer4.
10. International Conference of the Euspen Society for Precision Engineering & Nanotechnology, 31.05.2010-04.06.2010, Delft, Niederlanden
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
2SINTEF IKT Optical measurement systems and data analysis, Trondheim, Norway.
3Institute of Micromechanics and Photonics, Warsaw University of Technology, Warsaw, Poland.
4CSEM Centre Suisse d'Electronique et de Microtechnique SA, Zurich, Schwitzerland.
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