Aktuelle Publikation
NPS6D200 – Realization of high precision long stroke vertical actuation in conjunction with a planar direct drive
Steffen Hesse1.
Michael Katzschmann1.
Alex S. Huaman1.
Davi-Anders Brasil1.
Ludwig Herzog1.
Special Interest Conference: Precision Motion Systems and Control, Brabanthallen’s-Hertogenbosch, Netherlands, November 12-13, 2024
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.