Aktuelle Publikation
NPS6D200 – Realization of high precision long stroke vertical actuation in conjunction with a planar direct drive
Steffen Hesse1, Michael Katzschmann1, Alex S. Huaman1, Davi Anders Brasil1, Ludwig Herzog1
euspen Special Interest Conference: Precision Motion Systems and Control, , Brabanthallen ’s-Hertogenbosch, Netherlands
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany