Aktuelle Publikation
Interferometrically controlled, scalable x-y planar positioning stage concept
Ilko Rahneberg1, Enrico Langlotz1, Denis Dontsov1, Steffen Hesse2, Jaqueline Stauffenberg3, Eberhard Manske3
Special Interest Group Meeting: Micro/Nano Manufacturing, , Virtual
1SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany, 2IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 3Technische Universität Ilmenau, Institute of Process Measurement and Sensor Technology, Production and Precision Measurement Technology Group, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, Thuringia, Germany