Aktuelle Publikation
From Tracking Error to Accuracy – Error Budgeting and Compensation Approaches in Long-Range Nanopositioning Systems
Ludwig Herzog1.
2026 PI Symposium on Mechatronics System Design, June 16-17, 2026, Karlsruhe, Germany
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.