Design of a Capacitive Humidity Sensor Frontend with an Adaptive Resolution for Energy Autonomous Applications

Maximilian Wiener¹, Benjamin Saft¹

2019 15th Conference on Ph.D Research in Microelectronics and Electronics (PRIME), 15.07.2019 – 18.07.2019, Lausanne, Switzerland, pp. 137-140, DOI: doi.org/10.1109/PRIME.2019.8787836

¹IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany

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Design of a Capacitive Humidity Sensor Frontend with an Adaptive Resolution for Energy Autonomous Applications