Aktuelle Publikation
A modular application specific active test environment for high-temperature wafertest up to 300 °C
Michael Meister1, Marco Reinhard1
International Conference and Exhibition on High Temperature Electronics Network (HiTEN 2019), , St. Anne’s College in the University of Oxford, Oxford, United Kingdom, DOI: doi.org/10.4071/2380-4491.2019.HiTen.000122
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany