Setting up vibrometric analysis in the mechatronics lab for the energy harvesting systems developed at IMMS. Photograph: IMMS.

Micro-electro-mechanical systems (MEMS)

Extending only over an area of a few square millimetres, MEMS (micro-electromechanical systems) combine micromechanical sensors and actuators with control electronics in a single device. The fields in which IMMS concentrates its R&D activities are MEMS-based electronic systems for innovative applications in industrial measurement technology, automation and control engineering and for special new growth areas such as the life sciences and biomedical technology. New approaches, such as the MEMS energy harvesting modules developed by IMMS, will make production of a wide range of innovative devices possible, with attractive market opportunities particularly for small and medium enterprises.

To open up these markets successfully in cooperation with its customers, IMMS has been continuously applying itself to extending its MEMS design capabilities. The Institute works in close cooperation with MEMS process development and manufacturing partners, itself focusing on the design of new mechatronic systems solutions. We put another main emphasis of our work on the characterisation and testing of MEMS components and modules by setting up specific laboratory equipment and by means of non-destructive measurement methods.