ANSYS simulation of the transmission behavior of a magnetostrictive piezoelectric MEMS beam structure. Photograph: IMMS.
ANSYS simulation of the transmission behavior of a magnetostrictive piezoelectric MEMS beam structure. Photograph: IMMS.

Research projects in the field of micro-electro-mechanical systems

MagSens

Das IMMS forscht mit an MEMS-Sensoren, die künftig schwächste Magnetfelder detektieren sollen, wie z.B. in der Medizintechnik. more »

MEMS-Vibro3D

New research infrastructure for the next MEMS generation: 3D vibrometer system and new broadband amplifier more »

RoMulus

Systematic design and economical manufacture for intelligent multi-sensor systems in small quantities more »

IRIS

IMMS is working on new analytic methods to permit quality testing of encapsulated MEMS during manufacture. more »

MUSIK

IMMS is investigating, modelling and validating MEMS characteristics in order to develop basic blocks for a universally applicable method for... more »

MEMS-T-Lab

In the lab IMMS takes highly complex measurements of complete MEMS wafers at a new level of automation. more »

MEMS2015

The IMMS tool automatically generates mechanical designs. MEMS can be simulated and verified as an entire system. more »

GreenSense

For bio-analysis IMMS developed energy-efficient multi-parametric RFID microsensors and energy harvesting modules for operating autonomous... more »

PRIMOS

IMMS made contributions that allow vibrating quartzes in microprocessors to be substituted with MEMS resonators. more »