Preparations for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision. Photograph: IMMS.
Preparations for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision. Photograph: IMMS.

Research projects in the field of high-precision drives

NanoFab

Since 2017, IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with... more »

AFiA

IMMS has developed a vertical drive to raise and lower objects through 10 mm under active control with nanometre precision. more »

TESCA

The drive system for a terahertz camera allows security checks whereby people can be effectively scanned for hidden objects as they simply pass... more »

SFB622

The work of IMMS on novel high-precision drives contributes to nanopositioning systems acting over long distances of travel. more »

Mag6D

Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision. more »

SMARTIEHS

The newly developed measurement system can simultaneously inspect MEMS structures on wafer level to significantly reduce test effort. more »

PMS380

Thanks to the planar drive system developed by IMMS microelectronic chips are separated from 12” wafers in semiconductor production worldwide. more »