Maglev direct drive with cable-free passive stage. Photograph: IMMS.
Maglev direct drive with cable-free passive stage. Photograph: IMMS.

Research Projects

Mag6D

Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision. more »

SMARTIEHS

The newly developed measurement system can simultaneously inspect MEMS structures on wafer level to significantly reduce test effort. more »

PRIMOS

IMMS made contributions that allow vibrating quartzes in microprocessors to be substituted with MEMS resonators. more »

TAB DVD photo diode

For industrial applications photodiodes have been efficiently integrated into existing low-cost CMOS and BiCMOS processes of ASIC production. more »

PMS380

Thanks to the planar drive system developed by IMMS microelectronic chips are separated from 12” wafers in semiconductor production worldwide. more »