IMMS developes, inter alia, energy-autonomous sensor system solutions for Bioanalytics. Photograph: IMMS.
IMMS developes, inter alia, energy-autonomous sensor system solutions for Bioanalytics. Photograph: IMMS.

Sensor systems

We develop solutions for integrated sensor systems. Our sensor interfaces include functions for analog sensor signal acquisition, digital signal processing, wired and wireless data communication, and low-power operation where required for energy-autonomous applications. We develop smart integrated solutions for measuring physical, biological, and chemical quantities such as:

  • Temperature and light,
  • Pressure and ion concentrations,
  • Electrical impedance, and
  • Magnetic flux.
  • Characterization, test, and product qualification

    Application-specific characterization, test concepts, and product qualification of sensor systems in multiphysical environments:

    • Measurement and test solutions for a wide range of semiconductor processes (CMOS, BiCMOS, SOI, SiC, Graphene, …)
    • Design and implementation of probe cards, load boards, and application boards
    • Test program implementation and test pattern conversion
    • Test data analysis and statistics
    • Custom configuration of our modular test platform and precision measurement equipment, e.g. for optoelectronic sensors or MEMS devices
    • Application of industrial reliability standards for microelectronic and micromechanical systems
  • Fields of application

    [Translate to English:]

    Das IMMS hat spezifische Kompetenzen aufgebaut, mit denen es Entwicklungen für Anwendungen im Hochtemperaturbereich und der Bioanalytik realisiert. Darüber hinaus erarbeitet das Institut Sensorsystemlösungen für die folgenden Applikationsfelder:

     

  • Technical equipment:

    • Prober for wafer-level testing of ASIC and MEMS devices, wafer diameters up to 300mm
    • Vibrometric analysis equipment for the characterisation of MEMS with the help of geometrical and material parameters: Polytec UHF120 und CLV-2534; equipment for the stimulation of the vibration modes of MEMS devices: HV-amplifier for capacitive excitation, manipulators for sample positioing etc.
    • FEM-Tools for the parametric modelling of MEMS
    • More details can be found via Institute/Equipment.
  • We Develop Energy-autonomous sensor systems:

    • Energy harvesting and ultra-low power design concepts for autonomous systems
    • Energy-efficient embedded hardware platforms and wireless data communication protocols
    • Energy management for embedded systems
  • We develop microelectronic and micromechanical sensor systems

    • Modeling and model-based computer-aided design of multiphysical systems
    • Design and physical implementation of applicationspecific integrated circuits (ASIC)
    • Development of custom sensor surface layer stacks and geometries
    • Complete system design including ASIC/PCB partitioning
    • and embedded software
    • Design and implementation of application-specific communication interfaces
      • Wired (SPI, I2C, PWM, SENT, CAN, …)
      • Wireless (RFID, 802.15.4, SAW, …)
    • Design and implementation of microelectromechanical systems (MEMS) such as
      • Energy harvesters
      • Inertial sensors
      • RF-MEMS
  • We develop microelectronic and micromechanical sensor systems

    • Modeling and model-based computer-aided design of multiphysical systems
    • Design and physical implementation of applicationspecific integrated circuits (ASIC)
    • Development of custom sensor surface layer stacks and geometries
    • Complete system design including ASIC/PCB partitioning
    • and embedded software
    • Design and implementation of application-specific communication interfaces
      • Wired (SPI, I2C, PWM, SENT, CAN, …)
      • Wireless (RFID, 802.15.4, SAW, …)
    • Design and implementation of microelectromechanical systems (MEMS) such as
      • Energy harvesters
      • Inertial sensors
      • RF-MEMS
  • Documents