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Project
Mag6D
Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.
Project
SMARTIEHS
The newly developed measurement system can simultaneously inspect MEMS structures on wafer level to significantly reduce test effort.
Project
IR_RX
IMMS’ biocompatible microelectronic chip is part of a retinal implant system with which blind patients are learning to see again.
Project
PRIMOS
IMMS made contributions that allow vibrating quartzes in microprocessors to be substituted with MEMS resonators.
Project
TAB DVD photo diode
For industrial applications photodiodes have been efficiently integrated into existing low-cost CMOS and BiCMOS processes of ASIC production.
Project
PMS380
Thanks to the planar drive system developed by IMMS microelectronic chips are separated from 12” wafers in semiconductor production worldwide.