Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.
Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.

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Towards alternative 3D nanofabrication in macroscopic working volumes

M. Kühnel1. T. Fröhlich1. R. Füßl1. M. Hoffmann6. E. Manske1. I. W. Rangelow2. J. Reger3. C. Schäffel5. S. Sinzinger4. J-P. Zöllner3.

Meas. Sci. Technol. 29 (2018) 114002, DOI: doi.org/10.1088/1361-6501/aadb57.

1Institute for Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98684 Ilmenau, PO Box 100565, Germany. 2Institute for Microelectronics and Nanoelectronics, Technische Universität Ilmenau, 98684 Ilmenau, PO Box 100565, Germany. 3Institute for Automation and Systems Engineering, Technische Universität Ilmenau, 98684 Ilmenau, PO Box 100565, Germany. 4Optical Engineering Department, Technische Universität Ilmenau, 98684 Ilmenau, PO Box 100565, Germany. 5IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 6Ruhr-Universität Bochum, Lehrstuhl für Mikrosystemtechnik, Universitätsstraße 150, ID 05 / 441, 44801 Bochum, Germany.