IMMS staff at the headquarters in Ilmenau, Germany. Photograph: IMMS.
IMMS staff at the headquarters in Ilmenau, Germany. Photograph: IMMS.

Technical Equipment

IMMS has a wide range of equipment for design, characterisation and testing of the systems developed at the Institute and for testing services. The spectrum covers different levels - starting from material parameters, transistors and devices to complex applications.

  • Equipment for sensor systems and ASICs

    • Comprehensive software for design and simulations (MATLAB / Simulink™, Cadence-/Coventor-Tools, SystemC etc.)
    • Clean room testing laboratory: 120 m² area in Erfurt, DIN EN ISO 14644-1, class 7
    • Wafer prober, wafer diameters from 200 to 300 mm
    • High-temperature measurement technology (300 °C on wafer / 350 °C on device)
    • RF measurement technology (up to 50 GHz / noise up to 26 GHz / integrated systems up to 6 GHz)
    • Application-specific configured modular PXI test systems as platform for parameter and mixed-signal measurements
    • Measurement technology for Optoelectronics (wafer prober with optical stimulation and optical bench, lasers with wave lengths of 405/635/785/844 nm)
    • ower electronics (curve tracer 400 A, pulsed/30 V; SMU 1100 V)
  • Equipment for actuator systems

    • Comprehensive design software (MATLAB/Simulink, ANSYS, Maxwell etc.) and high-performance computer equipment
    • Interferometric and capacitive distance and angle measurement technology
    • Measurement technology for magnetic quantities
    • Vibration and analytical measuring technology
    • Precise temperature measurement / control technology, thermography
    • Vacuum chambers for experimental setups
  • Equipment for MEMS

    • Comprehensive design software (Cadence- and Coventor-Tools, IMMS-Tools for MEMS design and -simulation)
    • Prober for wafer-level testing of ASIC and MEMS devices, wafer diameters up to 300mm
    • Vibrometric analysis equipment for the characterisation of MEMS with the help of geometrical and material parameters: Polytec UHF120 und CLV-2534; equipment for the stimulation of the vibration modes of MEMS devices: HV-amplifier for capacitive excitation, manipulators for sample positioing etc.
    • FEM-Tools for the parametric modelling of MEMS
  • Equipment for signal processing, communication and system integration

    • MATLAB and Xilinx system generator
    • Comprehensive software for design and simulations (Cadence)
    • Altium Designer
    • Measurement technology for wireless communication
    • Climatic chamber
  • Equipment for open-loop and closed-loop controls

    • Comprehensive design software (MATLAB/Simulink, ANSYS, Maxwell etc.) and high-performance computer equipment
    • Development environments for industrial control systems like B&R, Beckhoff
    • Rapid Prototyping Systems like dSpace for rapid initial setups
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