Work at IMMS for the Physikalisch-Technische Bundesanstalt (PTB) on a nanometre-precision planar  drive system. Photograph: IMMS.
Work at IMMS for the Physikalisch-Technische Bundesanstalt (PTB) on a nanometre-precision planar drive system. Photograph: IMMS.

Projects in the field semiconductor manufacturing

PTB

For the Physikalisch-Technische Bundesanstalt (PTB) IMMS developed a high-precision positioning system for measurement scales of the coming... more »

AFiA

IMMS has developed a vertical drive to raise and lower objects through 10 mm under active control with nanometre precision. more »

MEMS-Vibro3D

New research infrastructure for the next MEMS generation: 3D vibrometer system and new broadband amplifier more »

RoMulus

Systematic design and economical manufacture for intelligent multi-sensor systems in small quantities more »

IRIS

IMMS is working on new analytic methods to permit quality testing of encapsulated MEMS during manufacture. more »

ANCONA

Computer-aided verification methods have been developed to accelerate the design of Industry 4.0 applications. more »

MEMS-T-Lab

In the lab IMMS takes highly complex measurements of complete MEMS wafers at a new level of automation. more »

MEMS2015

The IMMS tool automatically generates mechanical designs. MEMS can be simulated and verified as an entire system. more »

SFB622

The work of IMMS on novel high-precision drives contributes to nanopositioning systems acting over long distances of travel. more »

Mag6D

Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision. more »