IMMS developes, inter alia, energy-autonomous sensor system solutions for Bioanalytics. Photograph: IMMS.
IMMS developes, inter alia, energy-autonomous sensor system solutions for Bioanalytics. Photograph: IMMS.

Sensor systems

We develop solutions for integrated sensor systems. Our sensor interfaces include functions for analog sensor signal acquisition, digital signal processing, wired and wireless data communication, and low-power operation where required for energy-autonomous applications. We develop smart integrated solutions for measuring physical, biological, and chemical quantities such as:

  • Temperature and light,
  • Pressure and ion concentrations,
  • Electrical impedance, and
  • Magnetic flux.
  • Characterization, test, and product qualification

    Application-specific characterization, test concepts, and product qualification of sensor systems in multiphysical environments:

    • Measurement and test solutions for a wide range of semiconductor processes (CMOS, BiCMOS, SOI, SiC, Graphene, …)
    • Design and implementation of probe cards, load boards, and application boards
    • Test program implementation and test pattern conversion
    • Test data analysis and statistics
    • Custom configuration of our modular test platform and precision measurement equipment, e.g. for optoelectronic sensors or MEMS devices
    • Application of industrial reliability standards for microelectronic and micromechanical systems
  • Fields of application

    Das IMMS hat spezifische Kompetenzen aufgebaut, mit denen es Entwicklungen für Anwendungen im Hochtemperaturbereich und der Bioanalytik realisiert. Darüber hinaus erarbeitet das Institut Sensorsystemlösungen für die folgenden Applikationsfelder:


  • Technical equipment:

    • Prober for wafer-level testing of ASIC and MEMS devices, wafer diameters up to 300mm
    • Vibrometric analysis equipment for the characterisation of MEMS with the help of geometrical and material parameters: Polytec UHF120 und CLV-2534; equipment for the stimulation of the vibration modes of MEMS devices: HV-amplifier for capacitive excitation, manipulators for sample positioing etc.
    • FEM-Tools for the parametric modelling of MEMS
    • More details can be found via Institute/Equipment.
  • We Develop Energy-autonomous sensor systems:

    • Energy harvesting and ultra-low power design concepts for autonomous systems
    • Energy-efficient embedded hardware platforms and wireless data communication protocols
    • Energy management for embedded systems
  • We develop microelectronic and micromechanical sensor systems

    • Modeling and model-based computer-aided design of multiphysical systems
    • Design and physical implementation of applicationspecific integrated circuits (ASIC)
    • Development of custom sensor surface layer stacks and geometries
    • Complete system design including ASIC/PCB partitioning
    • and embedded software
    • Design and implementation of application-specific communication interfaces
      • Wired (SPI, I2C, PWM, SENT, CAN, …)
      • Wireless (RFID, 802.15.4, SAW, …)
    • Design and implementation of microelectromechanical systems (MEMS) such as
      • Energy harvesters
      • Inertial sensors
      • RF-MEMS
  • Design and realization of microelectromechanical systems (MEMS)

    • Energy-Harvesting-Systems
    • MEMS sensors (pressure sensors, inertial sensors)
    • RF MEMS
    • Development of design methodologies of MEMS
  • Documents