Presentation of research results at the DATE2015 conference in Grenoble, France. Photograph: Felix Salfelder.
Presentation of research results at the DATE2015 conference in Grenoble, France. Photograph: Felix Salfelder.

IFAC 2019

04.09.2019 – 06.09.2019

Contribution to the Invited Session ”Precision scanning systems in metrology and manufacturing“

Integrated Planar 6-DOF Nanopositioning System

S. Gorges1, S. Hesse1, C. Schäffel1, I. Ortlepp2, E. Manske2, E. Langlotz3, D. Dontsov3.

  • 1IMMS GmbH
  • 2Technische Universität Ilmenau
  • 3SIOS Meßtechnik GmbH