Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.
Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.

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Systematischer MEMS-ASIC-Designflow am Beispiel eines Beschleunigungssensors

Dominik Karolewski1. Jenny Klaus1. Raiko Pevgonen1. Ralf Sommer1.

ISBN: 978-3-86386-914-4, Pages 9 - 14, Proceedings / EdaWorkshop 15, May 19 - 21, 2015, Dresden, Germany.

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany.