Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.
Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.

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Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus1. Roman Paris1. Ralf Sommer1.

13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) 2016, 27-30 June 2016, Lisbon, Portugal, pp. 1-4, DOI: doi.org/10.1109/SMACD.2016.7520730, (Best-Paper-Award-Runner-Up).

1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.