Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.
Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.

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Positioning performance of a planar nanopositioning system with 100mm circular travel range

St. Hesse1. C. Schäffel1. M. Katzschmann1. H.-J. Büchner2.

27th Annual Meeting of the American Society for Precision Engineering (ASPE), 2012, in Proceedings, ISBN 978-1-887706-61-2, p. 103-106.

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2Technische Universität Ilmenau, Institut für Prozessmess- und Sensortechnik, Ilmenau, Germany.