Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.
Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.

Scientific publications - Volumes Overview

  • Search

Physical Design and Verification of MEMS, RoMulus – Robuste Multisensorik zur Zustandsüberwachung in Industrie-4.0-Anwendungen

Volker Boos1. Jenny Klaus1. Gerold Schröpfer3. Johannes Eisenmenger4. Johannes Seelhorst5.

edaWorkshop 2017, 8-10 May 2017, Dresden.

1X-FAB Semiconductor Foundries AG, Germany, Erfurt. 2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany. 3Coventor. 4Carl Zeiss SMT GmbH, Germany. 5Robert Bosch, Germany.