Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.
Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.

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MEMS2015 - Schaltplan-basierter Entwurf von MEMS für Anwendungen in Optik und Robotik

Volker Boos1. Ralf Popp2. Mirco Meiners3. D. Meisel3. A. Müller4.

in Newsletter edacentrum, 01/2013.

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2edacentrum GmbH Hannover. 3Robert Bosch GmbH Stuttgart. 4X-FAB Semiconductor Foundries AG Erfurt.