Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.
Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.

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Electrostatic parallel-plate MEMS-Switch on Silicon-Ceramic-Composite-Substrates

Sebastian Gropp1. Astrid Frank2. Christoph Schäffel2. Matthias Hoffmann1.

Microwave Conference (GeMiC), 2015 German , 16-18 March 2015, Page(s) 414 - 417, DOI: dx.doi.org/10.1109/GEMIC.2015.7107841.

1Technische Universität Ilmenau, IMN MacroNano®, Germany. 2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany.