Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.
Presentation of research results at the ESSCIRC2014 conference in Venice. Photograph: IMMS.

Scientific publications - Volumes Overview

  • Search

A contribution towards model-based design of application-specific MEMS

Jenny Klaus1. Eric Schäfer1. Roman Paris1. Astrid Frank1. Ralf Sommer1.

In Integration, the VLSI Journal, Volume 58, 2017, Pages 454-462, ISSN 0167-9260, DOI: doi.org/10.1016/j.vlsi.2017.03.014.

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany.