Test Development for Photo Detecting Integrated Circuits
- schematic diagram of test setup for optical characterization on wafer
On wafer test setup for optoelectronic components
- high lateral resolution due to precise laser spot
- precise spot positioning with respect to Device Under Test (DUT)
- lateral scans to obtain local sensitivity variations
Analysis of lateral sensitivity at a photo diode array
- summation of sensitivity distribution of 2 photo diodes
- focus diodes of a PDIC
