18.10.2011 - 11. MEMUNITY Workshop

Challenges of RF MEMS Test at Cryogenic Environment

Andrej Rumiantsev

Cascade Microtech GmbH

Reliability Test Issues of Microcomponents

Dietmar Vogel

Fraunhofer Institute for Electronic Nano Systems (ENAS)

Test of RF MEMS Switches

Stefan Leidich

Fraunhofer Institute for Electronic Nano Systems (ENAS)

OLEDs on CMOS and Their Electro-Optical Test

Uwe Vogel, Johannes Kade

Fraunhofer Institute for Photonic Microsystems (IPMS)

Optical Waferlevel Testing of MEMS Micro Mirrors for LIDAR Applications

Joachim Janes

Fraunhofer Institute for Silicon Technology (ISIT)

Material Parameter Estimation of BEOL RF MEMS Structures

Matthias Wietstruck

IHP GmbH

Piezoelectrical Bulk Wave High Frequency Resonator - Simulation and Test

Dominik Karolewski

Institute for Microelectronic and Mechatronic Systems (IMMS)

Microphone Testing at Infineon Technologies

Alfon Dehè

Infineon Technologies AG

Probing of MEMS Pressure Sensors

Lutz Almeroth

Melexis GmbH

3D-Vibration Testing for MEMS: State of the Art and Future Challenges

Christian Rembe

Polytec GmbH

Test of Microwave and mm-Wave Components

n. n.

Rohde & Schwarz

Test of Energy Storage Micro Devices

Prof. Olfa Kanoun

Chemnitz University of Technology

Bulge Test of Thin AlN Membranes

Tobias Polster

Ilmenau University of Technology

Overview on RF MEMS Test at VTT

Tauno Vähä-Heikkilä

VTT Technical Research Centre of Finland

SMARTIEHS: An Innovative Concept of Parallel MEMS Testing

Malgorzata Kujawinska

Warsaw University of Technology